Dependence of Electrical Characteristics on Interfacial Structures of Epitaxial NiSi2/Si Schottky Contacts Formed from Ni/Ti/Si System

Osamu Nakatsuka; Atsushi Suzuki; Shingo Akimoto; Akira Sakai; Masaki Ogawa; Shigeaki Zaima

doi:https://doi.org/10.7567/SSDM.2007.F-10-1

2007 International Conference on Solid State Devices and Materials

Sep 18, 2007 - Sep 21, 2007
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

[F-10-1] Dependence of Electrical Characteristics on Interfacial Structures of Epitaxial NiSi2/Si Schottky Contacts Formed from Ni/Ti/Si System

Osamu Nakatsuka, Atsushi Suzuki, Shingo Akimoto, Akira Sakai, Masaki Ogawa, Shigeaki Zaima (1.Graduate School of Engineering, Nagoya University, 2.EcoTopia Science Institute, Nagoya University)

https://doi.org/10.7567/SSDM.2007.F-10-1

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