Defect Passivation by Hydrogen in Zinc Oxide Films Grown by MOCVD

Jungyol Jo; Ogweon Seo; Hyoshik Choi; Byeonggon Lee

doi:https://doi.org/10.7567/SSDM.2007.F-2-4

2007 International Conference on Solid State Devices and Materials

2007年9月18日〜 2007年9月21日
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

[F-2-4] Defect Passivation by Hydrogen in Zinc Oxide Films Grown by MOCVD

Jungyol Jo、Ogweon Seo、Hyoshik Choi、Byeonggon Lee (1.Department of Electrical and Computer Engineering, Ajou University、2.NFC, Samsung Advanced Institute of Technology、3.CDA Co., Ltd.)

https://doi.org/10.7567/SSDM.2007.F-2-4

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