Fabrication of 3-D Silicon Micro Probes for Neural Recording Using Multi-Step VLS Growth

A. Ikedo; N. Funagayama; T. Kawashima; H. Takao; K. Sawada; M. Ishida

doi:https://doi.org/10.7567/SSDM.2007.F-3-1

[F-3-1] Fabrication of 3-D Silicon Micro Probes for Neural Recording Using Multi-Step VLS Growth

A. Ikedo, N. Funagayama, T. Kawashima, H. Takao, K. Sawada, M. Ishida (1.Dept. of Electrical and Electronic Engineering, Toyohashi Univ. of Technology, 2.Intelligent Sensing System Research Center, Toyohashi Univ. of Technology, 3.Japan Science and Technology, CREST)

https://doi.org/10.7567/SSDM.2007.F-3-1

2007 International Conference on Solid State Devices and Materials

[F-3-1] Fabrication of 3-D Silicon Micro Probes for Neural Recording Using Multi-Step VLS Growth