Fabrication of 3-D Silicon Micro Probes for Neural Recording Using Multi-Step VLS Growth

A. Ikedo; N. Funagayama; T. Kawashima; H. Takao; K. Sawada; M. Ishida

doi:https://doi.org/10.7567/SSDM.2007.F-3-1

2007 International Conference on Solid State Devices and Materials

2007年9月18日〜 2007年9月21日
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

[F-3-1] Fabrication of 3-D Silicon Micro Probes for Neural Recording Using Multi-Step VLS Growth

A. Ikedo、N. Funagayama、T. Kawashima、H. Takao、K. Sawada、M. Ishida (1.Dept. of Electrical and Electronic Engineering, Toyohashi Univ. of Technology、2.Intelligent Sensing System Research Center, Toyohashi Univ. of Technology、3.Japan Science and Technology, CREST)

https://doi.org/10.7567/SSDM.2007.F-3-1

▲