[F-3-3] Pulsed Laser Irradiation of Silicon-Germanium-on-Insulator (Si0.17Ge0.83OI) Substrates for Strain Relaxation and Defect Reduction

Grace Huiqi Wang、Eng-Huat Toh、Xincai Wang、Keat-Mun Hoe、S. Tripathy、Guo-Qiang Lo、Ganesh Samudra、Yee-Chia Yeo. (1.Silicon Nano Device Lab., Dept. of Electrical and Computer Engineering, National University of Singapore (NUS)、2.Institute of Microelectronics (IME), Institute of Manufacturing Technology (SIMTECH))

https://doi.org/10.7567/SSDM.2007.F-3-3