Scanning Surface Hall Potentiometry on Semiconductor Wafers

Yuji Hidaka; Daiki Maruyama; Junichi Uchikoshi; Mizuho Morita; Kenta Arima

doi:https://doi.org/10.7567/SSDM.2007.F-7-3

2007 International Conference on Solid State Devices and Materials

Sep 18, 2007 - Sep 21, 2007
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

[F-7-3] Scanning Surface Hall Potentiometry on Semiconductor Wafers

Yuji Hidaka, Daiki Maruyama, Junichi Uchikoshi, Mizuho Morita, Kenta Arima (1.Department of Precision Science and Technology, Graduate School of Engineering, Osaka University)

https://doi.org/10.7567/SSDM.2007.F-7-3

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