Scanning Surface Hall Potentiometry on Semiconductor Wafers

Yuji Hidaka; Daiki Maruyama; Junichi Uchikoshi; Mizuho Morita; Kenta Arima

doi:https://doi.org/10.7567/SSDM.2007.F-7-3

2007 International Conference on Solid State Devices and Materials

2007年9月18日〜 2007年9月21日
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

[F-7-3] Scanning Surface Hall Potentiometry on Semiconductor Wafers

Yuji Hidaka、Daiki Maruyama、Junichi Uchikoshi、Mizuho Morita、Kenta Arima (1.Department of Precision Science and Technology, Graduate School of Engineering, Osaka University)

https://doi.org/10.7567/SSDM.2007.F-7-3

▲