Origin of Structural Phase Transformation of SiO2-doped HfO2

Kazuyuki Tomida; Koji Kita; Akira Toriumi

doi:https://doi.org/10.7567/SSDM.2007.F-9-3

2007 International Conference on Solid State Devices and Materials

Sep 18, 2007 - Sep 21, 2007
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

[F-9-3] Origin of Structural Phase Transformation of SiO2-doped HfO2

Kazuyuki Tomida, Koji Kita, Akira Toriumi (1.Department of Materials Engineering, School of Engineering, The University of Tokyo, 2.Research Fellow of the Japan Society for the Promotion of Science)

https://doi.org/10.7567/SSDM.2007.F-9-3

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