Origin of Structural Phase Transformation of SiO2-doped HfO2

Kazuyuki Tomida; Koji Kita; Akira Toriumi

doi:https://doi.org/10.7567/SSDM.2007.F-9-3

2007 International Conference on Solid State Devices and Materials

2007年9月18日〜 2007年9月21日
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

[F-9-3] Origin of Structural Phase Transformation of SiO2-doped HfO2

Kazuyuki Tomida、Koji Kita、Akira Toriumi (1.Department of Materials Engineering, School of Engineering, The University of Tokyo、2.Research Fellow of the Japan Society for the Promotion of Science)

https://doi.org/10.7567/SSDM.2007.F-9-3

▲