The Japan Society of Applied Physics

[F-9-3] Origin of Structural Phase Transformation of SiO2-doped HfO2

Kazuyuki Tomida, Koji Kita, Akira Toriumi (1.Department of Materials Engineering, School of Engineering, The University of Tokyo, 2.Research Fellow of the Japan Society for the Promotion of Science)

https://doi.org/10.7567/SSDM.2007.F-9-3