Surface Treatment of Ge(001) Surface by Radical Nitridation.

Hiroki Kondo; Misato Fujita; Akira Sakai; Masaki Ogawa; Shigeaki Zaima

doi:https://doi.org/10.7567/SSDM.2007.F-9-5

[F-9-5] Surface Treatment of Ge(001) Surface by Radical Nitridation.

Hiroki Kondo, Misato Fujita, Akira Sakai, Masaki Ogawa, Shigeaki Zaima (1.Department of Crystalline Materials Science, Graduate School of Engineering, Nagoya University, 2.EcoTopia Science Institute, Nagoya University, 3.Present affiliation: Department of Systems Innovation, Graduate School of Engineering Science, Osaka University)

https://doi.org/10.7567/SSDM.2007.F-9-5

2007 International Conference on Solid State Devices and Materials

[F-9-5] Surface Treatment of Ge(001) Surface by Radical Nitridation.