Investigations of Metal/Insulator/AlGaN/GaN Structures by Capacitance-Voltage Measurements and Auger Chemical Profiling

B. Adamowicz; M. Miczek; T. Hashizume; A. Klimasek; P. Bobek; J. Zywicki

doi:https://doi.org/10.7567/SSDM.2007.G-6-3

[G-6-3] Investigations of Metal/Insulator/AlGaN/GaN Structures by Capacitance-Voltage Measurements and Auger Chemical Profiling

B. Adamowicz、M. Miczek、T. Hashizume、A. Klimasek、P. Bobek、J. Zywicki (1.Department of Applied Physics, Institute of Physics, Silesian University of Technology、2.Research Center for Integrated Quantum Electronics and Graduate School of Electronics and Information Engineering, Hokkaido University、3.High-Tech International Services Inc.)

https://doi.org/10.7567/SSDM.2007.G-6-3

2007 International Conference on Solid State Devices and Materials

[G-6-3] Investigations of Metal/Insulator/AlGaN/GaN Structures by Capacitance-Voltage Measurements and Auger Chemical Profiling