Fabrication of vertically-aligned CNT electrodes using plasma-enhanced CVD for chemical sensors.

Yoshihiro Kojima; Shigeru Kishimoto; Mina Okochi; Hiroyuki Honda; Takashi Mizutani

doi:https://doi.org/10.7567/SSDM.2007.H-3-3

2007 International Conference on Solid State Devices and Materials

Sep 18, 2007 - Sep 21, 2007
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

[H-3-3] Fabrication of vertically-aligned CNT electrodes using plasma-enhanced CVD for chemical sensors.

Yoshihiro Kojima, Shigeru Kishimoto, Mina Okochi, Hiroyuki Honda, Takashi Mizutani (1.Department of Quantum Engineering, Nagoya University, 2.VBL, Nagoya University)

https://doi.org/10.7567/SSDM.2007.H-3-3

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