Fabrication of vertically-aligned CNT electrodes using plasma-enhanced CVD for chemical sensors.

Yoshihiro Kojima; Shigeru Kishimoto; Mina Okochi; Hiroyuki Honda; Takashi Mizutani

doi:https://doi.org/10.7567/SSDM.2007.H-3-3

2007 International Conference on Solid State Devices and Materials

2007年9月18日〜 2007年9月21日
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

[H-3-3] Fabrication of vertically-aligned CNT electrodes using plasma-enhanced CVD for chemical sensors.

Yoshihiro Kojima、Shigeru Kishimoto、Mina Okochi、Hiroyuki Honda、Takashi Mizutani (1.Department of Quantum Engineering, Nagoya University、2.VBL, Nagoya University)

https://doi.org/10.7567/SSDM.2007.H-3-3

▲