New Type Oxygen Sensor Using Micro-fabricated Layered Semiconductor Compound

Tri Nugroho; Akihiro Ikeda; Yusuke Kakihara; Hisao Kuriyaki; Yukinori Kuroki

doi:https://doi.org/10.7567/SSDM.2007.I-10-6

2007 International Conference on Solid State Devices and Materials

2007年9月18日〜 2007年9月21日
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

[I-10-6] New Type Oxygen Sensor Using Micro-fabricated Layered Semiconductor Compound

Tri Nugroho、Akihiro Ikeda、Yusuke Kakihara、Hisao Kuriyaki、Yukinori Kuroki (1.Faculty of Information Science and Electrical Engineering, Kyushu University)

https://doi.org/10.7567/SSDM.2007.I-10-6

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