Direct Observation of Freeze-out Effect in Si by Kelvin Probe Force Microscope

M. Ligowski; R. Nuryadi; A. Ichiraku; M. Anwar; R. Jablonski; M. Tabe

doi:https://doi.org/10.7567/SSDM.2007.I-2-3

2007 International Conference on Solid State Devices and Materials

2007年9月18日〜 2007年9月21日
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

[I-2-3] Direct Observation of Freeze-out Effect in Si by Kelvin Probe Force Microscope

M. Ligowski、R. Nuryadi、A. Ichiraku、M. Anwar、R. Jablonski、M. Tabe (1.Research Institute of Electronics, Shizuoka University、2.Division of Sensors and Measuring Systems, Faculty of Mechatronics, Warsaw University of Technology)

https://doi.org/10.7567/SSDM.2007.I-2-3

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