[I-2-3] Direct Observation of Freeze-out Effect in Si by Kelvin Probe Force Microscope

M. Ligowski, R. Nuryadi, A. Ichiraku, M. Anwar, R. Jablonski, M. Tabe (1.Research Institute of Electronics, Shizuoka University, 2.Division of Sensors and Measuring Systems, Faculty of Mechatronics, Warsaw University of Technology)

https://doi.org/10.7567/SSDM.2007.I-2-3