[J-1-5] The Effect of Radical Oxidation on DRAM Cell Transistor with S-RCAT

Se Geun Park, Sung Hak Joe, Ji Hye Kim, Hyun Seung Song, Ik Don Choi, Sang Hyun Han, Yong Suk Ahn, Soon Byoung Park, Jong Sup Lee, Se Nyoung Kim, Won Taek Choi, Ki Jun Kim, Kyoung Seok Oh (1.Sam-Sung Electronic Corporation, DRAM Process Architecture Team)

https://doi.org/10.7567/SSDM.2007.J-1-5