[J-1-5] The Effect of Radical Oxidation on DRAM Cell Transistor with S-RCAT

Se Geun Park、Sung Hak Joe、Ji Hye Kim、Hyun Seung Song、Ik Don Choi、Sang Hyun Han、Yong Suk Ahn、Soon Byoung Park、Jong Sup Lee、Se Nyoung Kim、Won Taek Choi、Ki Jun Kim、Kyoung Seok Oh (1.Sam-Sung Electronic Corporation, DRAM Process Architecture Team)

https://doi.org/10.7567/SSDM.2007.J-1-5