[J-8-1] Improvement of Thermal Stability of MRAM Device with SiN Protective Film Deposited by HDP CVD

Katsumi Suemitsu、Yuichi Kawano、Hiroaki Utsumi、Hiroaki Honjo、Ryusuke Nebashi、Shinsaku Saito、Norikazu Ohshima、Tadahiko Sugibayashi、Hiromitsu Hada、Tatsuhiko Nohisa、Tadashi Shimazu、Masahiko Inoue、Naoki Kasai (1.NEC Corporarion, Device Platforms Research Laboratories、2.Mitsubishi Heavy Industries, LTD., Semiconductor Manufacturing Equipment Office)

https://doi.org/10.7567/SSDM.2007.J-8-1