Two-Dimensional Electron Gas Switching in an Ultra Thin Epitaxial ZnO Layer on a Ferroelectric Gate Structure

Yukihiro Kaneko; Hiroyuki Tanaka; Yoshihisa Kato; Yasuhiro Shimada

doi:https://doi.org/10.7567/SSDM.2007.J-8-2

2007 International Conference on Solid State Devices and Materials

2007年9月18日〜 2007年9月21日
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

[J-8-2] Two-Dimensional Electron Gas Switching in an Ultra Thin Epitaxial ZnO Layer on a Ferroelectric Gate Structure

Yukihiro Kaneko、Hiroyuki Tanaka、Yoshihisa Kato、Yasuhiro Shimada (1.Semiconductor Device Research Center, Semiconductor Company, Matsushita Electric Industrial Co., Ltd.)

https://doi.org/10.7567/SSDM.2007.J-8-2

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