[P-1-12] Galvanic Corrosion Suppression of High-k/Metal Gates using Organic Solvent based HF

D. Watanabe, H. Aoki, S. Hotta, C. Kimura, T. Sugino (1.Department of Electrical Electronic and Information Engineering, Osaka University)

https://doi.org/10.7567/SSDM.2007.P-1-12