[P-1-25L] Oxygen-Vacancy-Induced Vt shift in La-containing Devices

B.J. O’Sullivan, R. Mitsuhashi, G. Pourtois, V.S. Chang, C. Adelmann, T. Schram, L.-A. Ragnarsson, N. Van der Heyden, H.-J. Cho, Y. Harada, A. Veloso, R. O’Connor, L. Pantisano, H.Y. Yu, G. Groeseneken, P. Absil, S. Biesemans, A. Ikeda, M. Niwa (1.IMEC, 2.Matsushita Ltd, 3.TSMC, 4.Samsung, 5.Matsushita Electric Industrial Co. Ltd., 6.IMEC)

https://doi.org/10.7567/SSDM.2007.P-1-25L