[P-1-26L] Physical Understanding of Determinant Factors for Φeff on La-based High-k

Masamichi Suzuki、Tatsuo Schimizu、Masato Koyama (1.Advanced LSI Technology Laboratory, Corporate Research & Development Center, Toshiba Corporation)

https://doi.org/10.7567/SSDM.2007.P-1-26L