Pr-Oxide-Based Dielectric Films on Ge Substrates

Mitsuo Sakashita; Nobuyuki Kito; Akira Sakai; Hiroki Kondo; Osamu Nakatsuka; Masaki Ogawa; Shigeaki Zaima

doi:https://doi.org/10.7567/SSDM.2007.P-1-4

2007 International Conference on Solid State Devices and Materials

2007年9月18日〜 2007年9月21日
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

[P-1-4] Pr-Oxide-Based Dielectric Films on Ge Substrates

Mitsuo Sakashita、Nobuyuki Kito、Akira Sakai、Hiroki Kondo、Osamu Nakatsuka、Masaki Ogawa、Shigeaki Zaima (1.Graduate School of Engineering, Nagoya University、2.EcoTopia Science Institute, Nagoya University)

https://doi.org/10.7567/SSDM.2007.P-1-4

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