[P-1-9] Robust High-κ HfOxNy n-MOSFETs Using Low Work Function TbN Gate

Nai-Chao Su, Chien-Hung Wu, Shui-Jinn Wang, Chen-Kuo Chiang, Ching-Cheng Cheng (1.Institute of Microelectronics, Dept. of Electrical Eng., 2.National Cheng Kung Univ.)

https://doi.org/10.7567/SSDM.2007.P-1-9