[P-11-10] Pulsating Tension Fatigue Testing of Single and Poly-Crystalline Silicon Microstructures for Silicon MEMS

Takahiro Namazu、Yuji Nagai、Shozo Inoue (1.Department of Mechanical and System Engineering, University of Hyogo)

https://doi.org/10.7567/SSDM.2007.P-11-10