[P-11-12L] pH Sensing Performance and Electrical Characterization on Hafnium Oxide Gate ISFETs with Single and Dual Stack Insulator by RF Sputtering

Tseng-Fu Lu、Yen-Chih Lin、Chia-Ming Yang、Chao-Sung Lai、Dorota G. Pijanowska、Bohdan Jaroszewicz (1.Department of Electronic Engineering, Chang Gung University)

https://doi.org/10.7567/SSDM.2007.P-11-12L