[P-11-12L] pH Sensing Performance and Electrical Characterization on Hafnium Oxide Gate ISFETs with Single and Dual Stack Insulator by RF Sputtering

Tseng-Fu Lu, Yen-Chih Lin, Chia-Ming Yang, Chao-Sung Lai, Dorota G. Pijanowska, Bohdan Jaroszewicz (1.Department of Electronic Engineering, Chang Gung University)

https://doi.org/10.7567/SSDM.2007.P-11-12L