[P-11-5] A Novel High-k Y2O3 Sensing Membrane for pH-ISFET

Tung-Ming Pan、Kao-Ming Liao、Jian-Chyi Lin、Chih-Hung Cheng、Zhao-Wen Lin、Chih-Jen Chang (1.Department of Electronic Engineering, Chang Gung University)

https://doi.org/10.7567/SSDM.2007.P-11-5