[P-11-5] A Novel High-k Y2O3 Sensing Membrane for pH-ISFET

Tung-Ming Pan, Kao-Ming Liao, Jian-Chyi Lin, Chih-Hung Cheng, Zhao-Wen Lin, Chih-Jen Chang (1.Department of Electronic Engineering, Chang Gung University)

https://doi.org/10.7567/SSDM.2007.P-11-5