ZnO Nanowire-Based CO Sensors Prepared at Various Temperatures

Ting-Jen Hsueh; Shoou-Jinn Chang; Cheng-Liang Hsu; I-Cherng Chen

doi:https://doi.org/10.7567/SSDM.2007.P-13-1

[P-13-1] ZnO Nanowire-Based CO Sensors Prepared at Various Temperatures

Ting-Jen Hsueh、Shoou-Jinn Chang、Cheng-Liang Hsu、I-Cherng Chen (1.Institute of Microelectronics & Department of Electrical Engineering National Cheng Kung University、2.Department of Electronic Engineering, National University of Tainan、3.Micro Systems Technology Center, Industrial Technology Research Institute South)

https://doi.org/10.7567/SSDM.2007.P-13-1

2007 International Conference on Solid State Devices and Materials

[P-13-1] ZnO Nanowire-Based CO Sensors Prepared at Various Temperatures