Low Dielectric Constant Non-Porous Fluorocarbon Films for Inter-Layer Dielectric

Azumi Itoh; Atsutoshi Inokuchi; Seiji Yasuda; Akinobu Teramoto; Tetsuya Goto; Masaki Hirayama; Tadahiro Ohmi

doi:https://doi.org/10.7567/SSDM.2007.P-2-1

2007 International Conference on Solid State Devices and Materials

2007年9月18日〜 2007年9月21日
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

[P-2-1] Low Dielectric Constant Non-Porous Fluorocarbon Films for Inter-Layer Dielectric

Azumi Itoh、Atsutoshi Inokuchi、Seiji Yasuda、Akinobu Teramoto、Tetsuya Goto、Masaki Hirayama、Tadahiro Ohmi (1.New Industry Creation Hatchery Center, Tohoku University、2.ZEON CORPORATION、3.TOKYO ELECTRON LTD.)

https://doi.org/10.7567/SSDM.2007.P-2-1

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