Low Dielectric Constant Non-Porous Fluorocarbon Films for Inter-Layer Dielectric

Azumi Itoh; Atsutoshi Inokuchi; Seiji Yasuda; Akinobu Teramoto; Tetsuya Goto; Masaki Hirayama; Tadahiro Ohmi

doi:https://doi.org/10.7567/SSDM.2007.P-2-1

2007 International Conference on Solid State Devices and Materials

Sep 18, 2007 - Sep 21, 2007
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

[P-2-1] Low Dielectric Constant Non-Porous Fluorocarbon Films for Inter-Layer Dielectric

Azumi Itoh, Atsutoshi Inokuchi, Seiji Yasuda, Akinobu Teramoto, Tetsuya Goto, Masaki Hirayama, Tadahiro Ohmi (1.New Industry Creation Hatchery Center, Tohoku University, 2.ZEON CORPORATION, 3.TOKYO ELECTRON LTD.)

https://doi.org/10.7567/SSDM.2007.P-2-1

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