The Japan Society of Applied Physics

[P-2-3] Effects of vapor phase transport synthesis on the properties of porous silica films

Y. Cho, T. Seo, K. Kohmura, T. Kikkawa (1.Research Center for Nanodevices and Systems, Hiroshima University, 2.Mitsui Chemicals, Inc. Catalyst Science Laboratory Heterogeneous Catalysis Group)

https://doi.org/10.7567/SSDM.2007.P-2-3