Integration of MIM Capacitors on BCB with Thin-Film MCM-D Technology

Jimin Maeng; Sangsub Song; Chan-Sei Yoo; Heeseok Lee; Kwangseok Seo

doi:https://doi.org/10.7567/SSDM.2007.P-2-4

2007 International Conference on Solid State Devices and Materials

2007年9月18日〜 2007年9月21日
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

[P-2-4] Integration of MIM Capacitors on BCB with Thin-Film MCM-D Technology

Jimin Maeng、Sangsub Song、Chan-Sei Yoo、Heeseok Lee、Kwangseok Seo (1.Seoul National University, Department of Electrical Engineering、2.Semiconductor Business, Samsung Electronics Company Ltd.)

https://doi.org/10.7567/SSDM.2007.P-2-4

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