[P-2-4] Integration of MIM Capacitors on BCB with Thin-Film MCM-D Technology

Jimin Maeng, Sangsub Song, Chan-Sei Yoo, Heeseok Lee, Kwangseok Seo (1.Seoul National University, Department of Electrical Engineering, 2.Semiconductor Business, Samsung Electronics Company Ltd.)

https://doi.org/10.7567/SSDM.2007.P-2-4