The Japan Society of Applied Physics

[P-2-4] Integration of MIM Capacitors on BCB with Thin-Film MCM-D Technology

Jimin Maeng、Sangsub Song、Chan-Sei Yoo、Heeseok Lee、Kwangseok Seo (1.Seoul National University, Department of Electrical Engineering、2.Semiconductor Business, Samsung Electronics Company Ltd.)

https://doi.org/10.7567/SSDM.2007.P-2-4