Novel Ta-precursors for the CVD and ALD of TaNx diffusion barrier layers

Michael Pokoj; Igor Nemeth; Kerstin Volz; Daniel Gaess; Alexei Merkoulov; Jorg Sundermeyer; Wolfgang Stolz

doi:https://doi.org/10.7567/SSDM.2007.P-2-5

2007 International Conference on Solid State Devices and Materials

Sep 18, 2007 - Sep 21, 2007
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

[P-2-5] Novel Ta-precursors for the CVD and ALD of TaNx diffusion barrier layers

Michael Pokoj, Igor Nemeth, Kerstin Volz, Daniel Gaess, Alexei Merkoulov, Jorg Sundermeyer, Wolfgang Stolz (1.Material Sciences Center and Department of Physics and Chemistry)

https://doi.org/10.7567/SSDM.2007.P-2-5

▲