Novel Ta-precursors for the CVD and ALD of TaNx diffusion barrier layers

Michael Pokoj; Igor Nemeth; Kerstin Volz; Daniel Gaess; Alexei Merkoulov; Jorg Sundermeyer; Wolfgang Stolz

doi:https://doi.org/10.7567/SSDM.2007.P-2-5

2007 International Conference on Solid State Devices and Materials

2007年9月18日〜 2007年9月21日
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

[P-2-5] Novel Ta-precursors for the CVD and ALD of TaNx diffusion barrier layers

Michael Pokoj、Igor Nemeth、Kerstin Volz、Daniel Gaess、Alexei Merkoulov、Jorg Sundermeyer、Wolfgang Stolz (1.Material Sciences Center and Department of Physics and Chemistry)

https://doi.org/10.7567/SSDM.2007.P-2-5

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