[P-2-8] Raman Spectroscopic Study for Determining Stress Component in Single Crystal Silicon Microstructure using Multivariate Analysis

Nobuyuki Naka, Shinsuke Kashiwagi, Yuji Nagai, Takahiro Namazu, Shozo Inoue, Kunio Ohtsuki (1.Semiconductor Systems R&D Department, HORIBA, Ltd., 2.Department of Mechanical and System Engineering, University of Hyogo)

https://doi.org/10.7567/SSDM.2007.P-2-8