Raman Spectroscopic Study for Determining Stress Component in Single Crystal Silicon Microstructure using Multivariate Analysis

Nobuyuki Naka; Shinsuke Kashiwagi; Yuji Nagai; Takahiro Namazu; Shozo Inoue; Kunio Ohtsuki

doi:https://doi.org/10.7567/SSDM.2007.P-2-8

2007 International Conference on Solid State Devices and Materials

2007年9月18日〜 2007年9月21日
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

[P-2-8] Raman Spectroscopic Study for Determining Stress Component in Single Crystal Silicon Microstructure using Multivariate Analysis

Nobuyuki Naka、Shinsuke Kashiwagi、Yuji Nagai、Takahiro Namazu、Shozo Inoue、Kunio Ohtsuki (1.Semiconductor Systems R&D Department, HORIBA, Ltd.、2.Department of Mechanical and System Engineering, University of Hyogo)

https://doi.org/10.7567/SSDM.2007.P-2-8

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