[P-3-12] Impacts of SiN Deposition Conditions on NMOSFETs

Ching-Sen Lu, Kai-Hsiang Chan, Horng-Chih Lin, Tiao-Yuan Huang (1.Institute of Electronics, National Chiao Tung University, 2.National Nano Device Laboratories)

https://doi.org/10.7567/SSDM.2007.P-3-12