Impacts of SiN Deposition Conditions on NMOSFETs

Ching-Sen Lu; Kai-Hsiang Chan; Horng-Chih Lin; Tiao-Yuan Huang

doi:https://doi.org/10.7567/SSDM.2007.P-3-12

2007 International Conference on Solid State Devices and Materials

2007年9月18日〜 2007年9月21日
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

[P-3-12] Impacts of SiN Deposition Conditions on NMOSFETs

Ching-Sen Lu、Kai-Hsiang Chan、Horng-Chih Lin、Tiao-Yuan Huang (1.Institute of Electronics, National Chiao Tung University、2.National Nano Device Laboratories)

https://doi.org/10.7567/SSDM.2007.P-3-12

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