[P-3-14] New Observation of NBTI Degradation and Recovery Effect of Plasma Nitrided Oxide in Nano Scale PMOSFET’s

In-Shik Han, Hee-Hwan Ji, Tae-Gyu Goo, Ook-Sang You, Won-Ho Choi, Min-Ki Na, Ga-Won Lee, Yong-Goo Kim, Sung-Hyung Park, Heui-Seung Lee, Young-Seok Kang, Dae-Byung Kim, Hi-Deok Lee (1.Dept. of Electronics Engineering, Chungnam National University, 2.Magnachip Semiconductor Inc.)

https://doi.org/10.7567/SSDM.2007.P-3-14