[P-3-14] New Observation of NBTI Degradation and Recovery Effect of Plasma Nitrided Oxide in Nano Scale PMOSFET’s

In-Shik Han、Hee-Hwan Ji、Tae-Gyu Goo、Ook-Sang You、Won-Ho Choi、Min-Ki Na、Ga-Won Lee、Yong-Goo Kim、Sung-Hyung Park、Heui-Seung Lee、Young-Seok Kang、Dae-Byung Kim、Hi-Deok Lee (1.Dept. of Electronics Engineering, Chungnam National University、2.Magnachip Semiconductor Inc.)

https://doi.org/10.7567/SSDM.2007.P-3-14