The Japan Society of Applied Physics

[P-3-3] Extra Bonus on Transistor Optimization with Stress Enhanced Notch-gate Technology for sub-90nm CMOSFET

W.-K. Yeh、C.-M. Lai、Y.-K. Fang、C.-W. Hsu、C.-T. Lin、C.-H. Hsu、L.-W. Chen、Y.-T. Huang、C.-T. Tsai (1.Department of Electrical Engineering, National University of Kaohsiung、2.Institute of Microelectronics, National Cheng Kung University、3.United Microelectronics Corporation, Central R&D Division)

https://doi.org/10.7567/SSDM.2007.P-3-3