Optimum Rapid Thermal Activation for Mg-doped p-type GaN

Motoi Nagamori; Shuichi Ito; Hiroshi Saito; Kenji Shiojima; Shuhei Yamada; Naoki Shibata; Masaaki Kuzuhara

doi:https://doi.org/10.7567/SSDM.2007.P-6-3

2007 International Conference on Solid State Devices and Materials

Sep 18, 2007 - Sep 21, 2007
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

[P-6-3] Optimum Rapid Thermal Activation for Mg-doped p-type GaN

Motoi Nagamori, Shuichi Ito, Hiroshi Saito, Kenji Shiojima, Shuhei Yamada, Naoki Shibata, Masaaki Kuzuhara (1.Graduate School of Engineering, University of Fukui, 2.Toyoda gosei Corporation)

https://doi.org/10.7567/SSDM.2007.P-6-3

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