Effects of High-κ Passivation Films on AlGaN/GaN HEMT

Shuichi Yagi; Mitsuaki Shimizu; Hajime Okumura; Hiromichi Ohashi; Kazuo Arai; Yoshiki Yano; Nakao Akutsu

doi:https://doi.org/10.7567/SSDM.2007.P-6-4

2007 International Conference on Solid State Devices and Materials

2007年9月18日〜 2007年9月21日
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

[P-6-4] Effects of High-κ Passivation Films on AlGaN/GaN HEMT

Shuichi Yagi、Mitsuaki Shimizu、Hajime Okumura、Hiromichi Ohashi、Kazuo Arai、Yoshiki Yano、Nakao Akutsu (1.National Institute of Advanced Industrial Science and Technology、2.Tsukuba Laboratory, Taiyo Nippon Sanso Corporation)

https://doi.org/10.7567/SSDM.2007.P-6-4

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