The Japan Society of Applied Physics

[P-6-4] Effects of High-κ Passivation Films on AlGaN/GaN HEMT

Shuichi Yagi, Mitsuaki Shimizu, Hajime Okumura, Hiromichi Ohashi, Kazuo Arai, Yoshiki Yano, Nakao Akutsu (1.National Institute of Advanced Industrial Science and Technology, 2.Tsukuba Laboratory, Taiyo Nippon Sanso Corporation)

https://doi.org/10.7567/SSDM.2007.P-6-4