Effects of High-κ Passivation Films on AlGaN/GaN HEMT

Shuichi Yagi; Mitsuaki Shimizu; Hajime Okumura; Hiromichi Ohashi; Kazuo Arai; Yoshiki Yano; Nakao Akutsu

doi:https://doi.org/10.7567/SSDM.2007.P-6-4

2007 International Conference on Solid State Devices and Materials

Sep 18, 2007 - Sep 21, 2007
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

[P-6-4] Effects of High-κ Passivation Films on AlGaN/GaN HEMT

Shuichi Yagi, Mitsuaki Shimizu, Hajime Okumura, Hiromichi Ohashi, Kazuo Arai, Yoshiki Yano, Nakao Akutsu (1.National Institute of Advanced Industrial Science and Technology, 2.Tsukuba Laboratory, Taiyo Nippon Sanso Corporation)

https://doi.org/10.7567/SSDM.2007.P-6-4

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